http://rdf.ncbi.nlm.nih.gov/pubchem/patent/MY-132207-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d78fe473c8a29219129bbc8bb50f6a59 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67366 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673 |
| filingDate | 1996-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cda7dd932882123e16442d459b441046 |
| publicationDate | 2007-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | MY-132207-A |
| titleOfInvention | Method of storing and transporting wafers and method of determining the amount of organic materials attached to stored wafers |
| abstract | THE INVENTION IS PREDICATED IN AN EXPERIMENTAL FINDING THAT BY SETTING THE TEMPERATURE IN A WAFER CASE, WHICH IS MADE OF POLYPROPYRENE OR LIKE ORGANIC RESIN AND IN WHICH WAFERS ARE STORED, TO -50 TO 15°C, PREFERABLY TO -50 TO 10°C, IT IS POSSIBLE TO MAKE THE INCREASE OF ORGANIC MATERIALS ATTACHED DURING THE STORAGE OF THE WAFERS SUBSTANTIALLY TO ZERO. THE INVENTION ALSO CONCENRS A METHOD OF DETERMINING THE AMOUNT OF ORGANIC MATERIALS ATTACHED TO WAFERS, WHICH COMPRISES THE STEPS OF ALLOWING A PREDETERMINED AMOUNT OF WATER DROP TO BE FORMED ON THE SURFACE OF A WAFER, THEN MEASURING THE ANGLE ALPHA BETWEEN THE WAFER AND A LINE DRAWN FROM THE CONTACT POINT OF 3 PHASES CONSISTING OF THE WATER DROP 10, THE WAFER 1 AND GAS ON THE WAFER SURFACE TO THE TOP OF THE WATER DROP 10, AND THEREBY OBTAINING THE CONTACT ANGLE (THETA) AS (THETA) = 2ALPHA , AND THEN DETERMINING THE AMOUNT OF ORGANIC MATERIALS FROM THE CONTACT ANGLE (THETA). |
| priorityDate | 1995-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
Total number of triples: 17.