| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-902
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-50 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate |
1997-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1998-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-980012049-A |
| titleOfInvention |
How to remove inorganic contaminants by chemical induction and extraction |
| abstract |
An embodiment of the present invention is a method of removing inorganic contaminants from an alternative surface of a semiconductor substrate, the method comprising reacting inorganic contaminants with at least one transformant to convert inorganic contaminants, and converting the inorganic contaminants into a first candle. Adding at least one solubilizer contained in the critical solution (preferably, supercritical CO2) to remove the converted inorganic contaminants, wherein the converted inorganic contaminants may be better dissolved in the solubilizer than the inorganic contaminants. |
| priorityDate |
1996-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |