http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-970076084-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-107 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate | 1997-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-970076084-A |
| titleOfInvention | Positive photosensitive resin composition and semiconductor device using same |
| abstract | (A) 100 parts by weight of polyamide represented by formula (1):n n n n n n n n [Wherein X represents a tetravalent aromatic group; Y represents two aromatic groups; Z represents a group represented by the following formula:n n n n n n n n Wherein R 1 and R 2 represent a divalent organic group, R 3 and R 4 represent a monovalent organic group; a and b represent a mole fraction; a + b = 100 mol%; a = 60.0 to 100.0 Mole%; b = 0 to 40.0 mole%; and n is an integer from 2 to 500)], (B) 1 to 100 parts by weight of the photosensitive diazoquinone compound, (C) 1 to 50 parts by weight of a phenol compound represented by a specific structural formula. And (D) a positive photosensitive resin composition containing 0.1 to 20 parts by weight of an organosilicon compound represented by a specific structural formula; And a pattern of the polybenzoxazole resin obtained by using the photosensitive resin composition having a thickness of 0.1 to 20 µm on the semiconductor element. |
| priorityDate | 1996-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451 |
Total number of triples: 17.