| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24C1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
1997-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1997-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-970074892-A |
| titleOfInvention |
Mechanochemical polishing slurry for metal layers and films |
| abstract |
Polishing slurries for mechanochemical polishing of metal layers and films during the various stages of multilevel interconnect fabrication involved in integrated circuit fabrication, which include aqueous media, abrasives, oxidants and organic acids. This polishing slurry significantly lowered or suppressed the silicon dioxide polishing rate to obtain enhanced selectivity. In addition, this polishing slurry is useful for effectively polishing the metal layer at the required polishing rate while minimizing surface defects and defects.n n n Also disclosed is a method of making an engine-shaped stencil metal / insulator film using the slurry of the present invention and a mechanochemical polishing technique associated therewith. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020047418-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100402442-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100425261-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100504359-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100307487-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100407296-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100498814-B1 |
| priorityDate |
1996-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |