abstract |
Bi, A metal element (where A is at least one metal element selected from Ca, Ba, Sr, Pb and Bi) and B metal element (where B is at least one metal element among Ti, Nb and Ta) Alkoxy metals β-diketone metal complexes and metal acetates, which are metal compounds corresponding to each independently, and a compound obtained by reacting an alcohol, a carbohydrate anhydride, glycol, β-diketone, a dikiric acid monoester, or the like. A coating liquid for forming a Bi-based dielectric thin film, a dielectric thin film formed using the same, a dielectric memory, and a manufacturing method thereof are disclosed. |