http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-970071134-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 1997-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-970071134-A |
| titleOfInvention | Chemically amplified forged resist materials |
| abstract | A chemically amplified forged resist material having high sensitivity to high-energy rays such as far ultraviolet rays, electron beams, X-rays, etc., and suitable for microfabrication techniques capable of forming patterns by developing with an aqueous solution of alkyllithium is obtained.n n n The weight average molecular weight is 1,000 as a (A) organic solvent, (B) a high molecular compound with a weight average molecular weight of 2,000-50,000 represented by following General formula (1) as a base resin, (C) acid generator, and (D) dissolution control agent. If it is 3,000 or less, the chemically amplified phage type comprising a compound in which a hydrogen atom of the phenolic hydroxyl group of the compound having a phenolic hydroxyl group in the molecule is partially substituted by an acid labile group at a ratio of more than 0% and 60% or less on average. Resist material.n n n n n n n n In the formula, R is a group represented by the following formula (2)n n n n n n n n In formula, R < 1> , R < 2> is respectively independently a hydrogen atom or a C1-C6 linear or branched alkyl group, R < 3> is a C1-C10 linear, branched or cyclic alkyl group, R < 2> And R 3 may be cyclically bonded), Q is an acid labile group, and x, y, and z are 0.05 ≦ x / (x + y + z) ≦ 0.8, 0 ≦ y / (x + y + z) ≦ 0.5, 0.2 ≦ z / (x + y + z) ≦ 0.95, and a number satisfying the relationship of n is an integer of 1 to 3. |
| priorityDate | 1996-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.