http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-970053557-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76828 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 1995-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-970053557-A |
| titleOfInvention | Manufacturing method of semiconductor device |
| abstract | According to the present invention, after forming a via hole in which the SOG film is partially exposed, the metal heat treatment removes moisture in the SOG film and simultaneously forms a densified cured layer on the exposed surface of the SOG film.n n n Accordingly, the present invention forms a cured layer on the surface of the SOG film exposed on the sidewalls of the via holes, thereby suppressing moisture inflow into the SOG film, while preventing the release of moisture from the SOG film exposed on the sidewalls of the via holes when the metal film is deposited at a high temperature. By suppressing and improving the layer covering property of the metal film, the defect due to disconnection is reduced and the yield is increased, and the improvement of the layer covering property of disconnection due to the operation of the device is reduced, so that the defect due to disconnection is reduced and the yield is increased. By minimizing the possibility of disconnection, the reliability of the device can be increased, as well as the fabrication of more integrated devices can be realized. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100613334-B1 |
| priorityDate | 1995-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.