| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125 |
| filingDate |
1996-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1997-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-970024315-A |
| titleOfInvention |
Sensor and method for manufacturing the same |
| abstract |
Provided are a sensor capable of assuring particularly advantageous contact connection of a sensor element by a conductive layer and a method of manufacturing the sensor. The conductive layer 3 is formed between the board | substrate 10 and the silicon layer 6, The electrically-conductive insect is insulated with respect to the part of the silicon layer 6 by the insulating layer 2. As shown in FIG. |
| priorityDate |
1995-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |