http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-970023753-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate | 1995-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-970023753-A |
| titleOfInvention | Metal liner flattening device using plasma surface treatment |
| abstract | The present invention relates to a planarization device for a wiring metal thin film using a plasma surface treatment in a semiconductor manufacturing process. The surface treatment of the deposited metal thin film, the connection window and the via hole by plasma can remove impurities and oxides on the surface of the substrate or the thin film. It is possible to precisely control the temperature and to install the reflow heat treatment by heating after metal thin film deposition and pretreatment of contact window and via simultaneously or sequentially in one reactor. It has high ionization rate and low plasma potential, so there are few contaminants from the reactor and small ion energy incident on the wafer. A plasma cleaning module; A substrate heating module which heats the wafer holder assembler by an external lamp and a reflector for reflecting efficiency and temperature uniformity to heat-treat the substrate by an indirect heating method; A vacuum module including a vacuum exhaust port on one side of the reactor for maintaining the vacuum of the reactor; It is characterized by consisting of a wafer transfer module having a wafer holder drive mechanism, a drive shaft and bellows as a component. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100786399-B1 |
| priorityDate | 1995-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.