http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-970020216-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36 |
| filingDate | 1996-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-970020216-A |
| titleOfInvention | Deposition of Amorphous SiNC Paint |
| abstract | Amorphous coatings containing silicon, carbon and nitrogen are formed by chemical vapor deposition of a reactive gas mixture comprising an organic silicon material and a nitrogen source. The method includes introducing a reactive gas mixture into a deposition chamber containing a support to be coated and then reacting to form a coating film. |
| priorityDate | 1995-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.