http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-970018139-A
Outgoing Links
| Predicate | Object |
|---|---|
| filingDate | 1995-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-970018139-A |
| titleOfInvention | Semiconductor Memory Device with Good Flatness |
| abstract | The present invention relates to a semiconductor device having good flatness, wherein a blocking film is provided between the high temperature oxide film and the interlayer planarization film, so that the yield and reliability of the semiconductor device can be improved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100452311-B1 |
| priorityDate | 1995-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069 |
Total number of triples: 9.