http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-970016836-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50 |
| filingDate | 1996-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1997-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-970016836-A |
| titleOfInvention | Photoresist Stripper Composition and Photoresist Stripping Method Using the Same |
| abstract | The present invention relates to (a) 2 to 30% by weight of hydroxylamines (b) 2 to 35% by weight of water (c) 2 to 20% by weight of amines having an acid dissociation constant (PKa) of 7.5 to 13 in an aqueous solution at 25 ° C. A peeling liquid composition for photoresists leading to 35 to 80% by weight of a water-soluble organic solvent and 2 to 20% by weight of an anticorrosive agent and a photoresist stripping method using the same.n n n Advantageous Effects of Invention The present invention is excellent in peelability of a deteriorated film formed by wet etching, ashing, ion implantation, and the like under more severe conditions, and is effective in preventing corrosion of both a substrate on which Al or an Al alloy is formed or a substrate on which Ti is formed. It is provided to the peeling liquid composition for resist excellent in the photoresist, and the photoresist peeling method using the same. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100842072-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100398996-B1 |
| priorityDate | 1995-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.