http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-970004425-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_526cb931f1382d6e016ee651d55e1365 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1993-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1997-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03a512e82c56a18b909d3d77ad55e407 |
| publicationDate | 1997-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-970004425-B1 |
| titleOfInvention | Conducting and Oxide Etching Methods for Semiconductor Devices |
| abstract | No content |
| priorityDate | 1993-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.