| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1993-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e1fc257f759a09fae7cc06bfdc0f4bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7d5f334d3a9b848527c651cbd57fac2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d97136ed57ec6fcd21c81b69e5ffe4dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efc1dd5636ec799243479d534bbd0c72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed4fd509503f599ea2ac08a130ad3b84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_685135077410e12efc4c3ea81a8704a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48fc1cc36329db794c31a4765013b864 |
| publicationDate |
1997-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-970000199-B1 |
| titleOfInvention |
Resist coating film material and pattern formation method using the same |
| abstract |
No content. |
| priorityDate |
1992-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |