http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-960025906-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2209-012 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-30 |
| filingDate | 1994-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1996-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-960025906-A |
| titleOfInvention | Method for preparing diamond-like carbon thin film field emitters for plasma chemical vapor deposition |
| abstract | A method for producing a diamondlike carbon thin film field emitter using a sputtering method is described. In the method of manufacturing a diamond-like carbon thin film field emitter of the present invention, a high-frequency powder is applied to a target using a sputtering method to deposit an electrode material to be applied to an electric field on a glass substrate 1 on a glass substrate, thereby producing an electrode 2. Forming a; It is composed of the step of forming a diamond-like carbon thin film 3 on the formed electrode by using plasma chemical vapor deposition.n n n According to the present invention, it is easy to deposit a large-area diamond-like carbon thin film to facilitate the fabrication of field emitters for large-area displays, as well as to increase the deposition rate, thereby increasing the total output.n n n Further, according to the present invention, the burden of expensive laser equipment purchase cost and maintenance cost is reduced, and the manufacturing cost of the field emitter for large area display is reduced.n n n In addition, according to the present invention, since the substrate can be dry-cleaned using argon plasma when the diamond-like carbon thin film is manufactured by plasma chemical vapor deposition, the adhesion between the chromium electrode and the diamond-like carbon thin film is improved. |
| priorityDate | 1994-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.