http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-950021512-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-06 |
| filingDate | 1993-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1995-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-950021512-A |
| titleOfInvention | Surface treatment method of heterojunction device |
| abstract | The present invention relates to a surface treatment method of a double junction device. In the present invention, the surface of the exposed emitter (9) to the base electrode (11) is subjected to hydrogenation by hydrogen ECR plasma without forming a protective band. And (A process), subsequently depositing a low temperature ECR nitride film 12 (B process), and forming a secondary connection electrode 13 to improve the current gain of the device. |
| priorityDate | 1993-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 14.