| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f25db8aac87fce7ba4fa082a674dc7e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02049
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B7-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
1989-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce050a7094a921aebcdf33137442b783
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6aa3a7c96bf186cf1317f1618f4cc1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9587aa92fb937608590d96b4a7e1ad0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81ba5cc81b43e99dd1a84ae70032589a |
| publicationDate |
1995-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-950013065-B1 |
| titleOfInvention |
Dry etching apparatus, dry etching method and anhydrous hydrogen fluoride gas generator for use there |
| abstract |
No content. |
| priorityDate |
1988-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |