http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-950012607-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 1994-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1995-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-950012607-A |
| titleOfInvention | Method for pretreating aluminum containing surfaces of deposition chamber before depositing tungsten silicide coating on semiconductor substrate |
| abstract | The present invention seeks to provide a method for pretreating the aluminum containing surfaces after precleaning the vacuum chamber and before depositing tungsten silicide on the substrate in the chamber. The method of the present invention first comprises treating an aluminum containing surface using a mixture of tungsten containing gas and silane, such as tungsten hexafluoride (WF 6 ), to form a first silane known tungsten silicide deposit on the aluminum containing surfaces. It includes. In a preferred embodiment, the process of the present invention provides dichlorosilane (SiH 2 Cl 2 ), monochlorosilane (SiH 3 Cl) or trichlorosilane to form a chlorine-substituted silane-based tungsten silicide over an already deposited silane-based tungsten silicide. Using a mixture of a chlorine substitute silane such as (SiHCl 3 ) and a tungsten-containing gas such as tungsten hexafluoride (WF 6 ), further treating the aluminum containing surface (already coated) of the chamber in a second step Include. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100587025-B1 |
| priorityDate | 1993-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.