http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-950009786-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 |
| filingDate | 1993-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1995-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-950009786-A |
| titleOfInvention | Method of manufacturing field emission cathode structure |
| abstract | The present invention discloses a method of manufacturing a field emission image forming apparatus.n n n The present invention forms a primitive tip (projection) located under the first thermal oxidation film through a first thermal oxidation process, and then nitride film on the surface of the first thermal oxide film covering the tip of the primitive shape. It is characterized in that the tip portion of the protrusion which is protected therefrom is not affected in the second thermal oxidation process, and only a portion of the lower end portion is oxidized to obtain a tip of a desired shape. The present invention can make the height of the tip constant, and furthermore, the height of the silicon tip can be adjusted to already and has the advantage of improving the productivity. |
| priorityDate | 1993-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 14.