| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_526cb931f1382d6e016ee651d55e1365 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate |
1992-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdfd6d2592ac51abeff60f7fa09e4474
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b43a49f90ebd5bd37b1a59f3d154aff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1ac412ca4218a39a29b3af16688aac1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aca1973e12c5715ef85c7dcecc0452d1 |
| publicationDate |
1995-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-950007571-B1 |
| titleOfInvention |
Metal wiring formation method of semiconductor device |
| abstract |
No content. |
| priorityDate |
1992-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |