| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd0a6fd59647aa8a8938cf0b9119f60f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76275 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-763 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-74 |
| filingDate |
1991-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed6c6df2971da636ce56bcddce5954fc |
| publicationDate |
1995-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-950003899-B1 |
| titleOfInvention |
Manufacturing Method of Semiconductor Substrate |
| abstract |
No content. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7358124-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7288790-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7884365-B2 |
| priorityDate |
1990-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |