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filingDate 1992-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 1993-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-930013036-A
titleOfInvention Vapor phase manufacturing method of chemisorption membrane
abstract The present invention provides chemical vapor deposition of chemical adsorption membranes for the purpose of uniformly adhering ultra-thin adsorption membranes having excellent water and oil repellency, fouling resistance, and the like by performing compound adsorption in a gaseous atmosphere on a substrate surface having or giving an active hydrogen group. The present invention relates to a manufacturing method, wherein the surface of a substrate having or provided with an active carboxyl group such as a hydroxyl group or an imino group is subjected to gaseous phase chemical adsorption in an atmosphere containing at least a crorosyl silane-based surfactant, without being limited to the substrate and for a short time. A chemical adsorption film is formed on the surface of the substrate. First, an adsorbent film of a siloxane monomolecular film or a polysiloxane film is formed in an atmosphere containing at least a chlorosilane compound on the surface of the substrate, and chemical adsorption is performed in an atmosphere containing at least a crorosilane-based surfactant. And also characterized in that to form a chemisorption monomolecular film or polymer film on the surface of the substrate in a short time.
priorityDate 1991-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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