| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23ba9f1b163682046ffe20a168fee68e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03C11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-00 |
| filingDate |
1985-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1993-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66274a6e7b5c6f64a7fa4e364390fe9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e56f238638fcebed00f59f0d69253c7 |
| publicationDate |
1993-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-930010219-B1 |
| titleOfInvention |
Photolithographic Methods and Combinations Including Blocking Layers |
| abstract |
No content. |
| priorityDate |
1984-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |