Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-04 |
filingDate |
1990-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1993-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95f3b283213c9725c3b8c8e63c5640a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c30a91543c138fdce275fc8efa4e3c2f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b69efc8e903fa22d49fc706a0f998664 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7574bf95052a008a6530b61b0b26ce65 |
publicationDate |
1993-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-930004951-B1 |
titleOfInvention |
Blanking aperture array and its manufacturing method and charged particle beam exposure apparatus and its exposure method |
abstract |
No content. |
priorityDate |
1989-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |