http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-920010284-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-60 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1991-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1992-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-920010284-A |
| titleOfInvention | Method for Analyzing Metal Impurities in Surface Oxide of Semiconductor Substrate |
| abstract | No content |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030004173-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100445020-B1 |
| priorityDate | 1990-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.