| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd0a6fd59647aa8a8938cf0b9119f60f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
1988-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1992-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5674ee6e3a4da7b253a626391376d4d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3d26ce2e87a15bd9cf89b7f214741ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41572163617ca78e3e2183a5110aeb05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5165602b5d16960e8899539a7b364add |
| publicationDate |
1992-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-920007449-B1 |
| titleOfInvention |
Surface treatment method and apparatus therefor in semiconductor processing |
| abstract |
No content. |
| priorityDate |
1987-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |