| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S252-951
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-065 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B25-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B31-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-50 |
| filingDate |
1989-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1992-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1179e7c7f5949a17dd8e307124d05681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68a584a3e702537aefdfea88f3abfab7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04b866fa7a0870cd7dc9cbe4520dda95 |
| publicationDate |
1992-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-920002010-B1 |
| titleOfInvention |
Deposition of Arsine, Antimony and Phosphine Substitutes |
| abstract |
No content. |
| priorityDate |
1988-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |