| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2001 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
1988-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1989-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-890011046-A |
| titleOfInvention |
Etching method and apparatus |
| abstract |
No content |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101124938-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8651049-B2 |
| priorityDate |
1987-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |