http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220166818-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b88ac97d55f88ec28bb912f0aa8c247b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C59-135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-332 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C59-135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G65-332 |
| filingDate | 2021-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f7e0eb257e370f45b9105391072847a |
| publicationDate | 2022-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20220166818-A |
| titleOfInvention | Fluorine-containing polymer for photoresist, upper antireflection layer composition containing the same and application thereof in photoresist |
| abstract | The present invention relates to a fluorine-containing polymer for photoresist, an upper antireflection layer composition comprising the same, and an application thereof in a photoresist. The structural formula of this fluorine-containing polymer for photoresist is CF 2 (CF 3 )CF 2 -[O-CF(CF 3 )CF 2 ]nO-CF(CF 3 )COO-R, where n is 1-8 within the range, R is one or more of H、NH 4 or other similar structures, calculated by the weight of the entire polymer, of which the content a of the polymer component having a number average molecular weight of less than 550 is 0-12%, and the number average molecular weight is The content b of the polymer component having a number average molecular weight of 650-900 is 75-90%, the content c of the polymer component having a number average molecular weight of 980-1050 is 5-15%, and the content d of the polymer component having a number average molecular weight exceeding 1150 is 0- 10%, and a and b may be 0 at the same time, or either may be 0 or may not be 0 at the same time. The present invention obtains a fluorine-containing polymer that satisfies the requirements of the specified components of the present invention by controlling the content distribution of polymer components of different molecular weights in the fluorine-containing polymer. This fluorine-containing polymer is easily biodegradable and toxic. It is low, environmentally friendly, and can be used for manufacturing an upper antireflection layer having a relatively low refractive index. |
| priorityDate | 2020-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.