http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220159023-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38cab484b85d126ea88fd527a30bf86a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate | 2021-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6445243452e54d9fd129921c48363dbb |
| publicationDate | 2022-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20220159023-A |
| titleOfInvention | Manufacturing method of treatment using two photon polymerization and nanoimprint and functional surface treatment produced by the method |
| abstract | The present invention relates to a method for manufacturing a device using two-photon polymerization and nanoimprint, and a functional surface device manufactured by the method, and more particularly, It is about. According to the present invention, an initial mold of a polymer type manufactured by a 3D printing method in order to secure high-efficiency characteristics, and an array mold that repeatedly transfers a microstructure shape on a wafer-shaped substrate using the mold are formed on a substrate by a nanoimprint method. It is possible to finally manufacture wafer-type engineering and optical devices with surface structures that realize various functions by infinitely replicating polymers. |
| priorityDate | 2021-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.