http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220142527-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45527
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45534
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45597
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-14
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
filingDate 2021-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2769aa9f85db43ee2c5b350e590c6dcd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5f6f7ee76662f1910ff95f9de0e0659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd78ebe210fd7f402d8ff53bccf7396c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1760c09b41ee77c58810735379b0a91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed18c6833ce25bc75935654d9ac03829
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78c552a46748c72853ad3f12a50ba97b
publicationDate 2022-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20220142527-A
titleOfInvention Backside Reaction Inhibitory Gas
abstract Methods and apparatus are provided herein for controlling uniformity of processing in an edge region of a semiconductor wafer. In some embodiments, methods include providing a backside suppression gas as part of a DID sequence.
priorityDate 2020-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID139469
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578624
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150966689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452397186
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558793
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520406
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559527
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6336889
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9321
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579030
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458391437
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61497
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419405613
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID152774261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25199659
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447676654
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID98885
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456370357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526467
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83301
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID522684
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23932
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423390484
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520718
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524206
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419514121
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433469478
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23950
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82219
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523397
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4084870
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453627542
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57418886
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID154510515

Total number of triples: 88.