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filingDate 2020-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9cc9ccffa31b8a092f6edd7dcb7a989
publicationDate 2022-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20220103176-A
titleOfInvention management method, measuring method, measuring device, crystal oscillator sensor, and set
abstract The present invention provides a management method, a measurement method, a measurement device, a crystal oscillator sensor, and a set for more conveniently managing the purity of a chemical solution containing an organic solvent. The management method of the present invention is a management method for detecting impurities in a chemical solution containing an organic solvent and managing the purity of the chemical solution. Step 2 of bringing a crystal oscillator sensor including a crystal vibrator into contact with a target chemical to obtain a change amount of the resonant frequency of the crystal oscillator due to contact with the target chemical, and the obtained resonant frequency change is based on a preset purity of the target chemical solution a step 3 of managing the purity of the chemical solution by comparing whether it falls within the allowable range of the change amount of the resonance frequency; in step 2, at least a part of the wetted portion in contact with the target chemical solution is made of a fluororesin.
priorityDate 2019-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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