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filingDate 2020-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8565cd1563e1d99d4680f2a45cf2816
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publicationDate 2022-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20220081757-A
titleOfInvention Hardmask composition and method of forming patterns
abstract It relates to a hard mask composition including a polymer including a moiety represented by the following Chemical Formula 1, and a solvent, and a pattern forming method. [Formula 1] In Formula 1, The definitions of A, B, R 1 to R 3 , a, and b are as described in the specification.
priorityDate 2020-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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