| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24592
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3222 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2021-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_111760d231ef3ccb47ac73cfb9e7c7fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9855762099611603e8bbe775cb6f9f99 |
| publicationDate |
2022-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20220076349-A |
| titleOfInvention |
Method of diagnosing chamber condition |
| abstract |
The present invention provides a technique for diagnosing the condition of a chamber. A method for diagnosing the condition of a chamber of a substrate processing apparatus for processing a product substrate, the method comprising: cleaning the interior of the chamber; A chamber condition comprising a step of generating a plasma of a gas mixed with the above inert gas, a step of measuring the light emission intensity of fluorine in the chamber, and a step of diagnosing the condition of the chamber based on the light emission intensity diagnostic method. |
| priorityDate |
2020-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |