| abstract |
Materials and methods are provided for modifying a semiconductor substrate surface to dramatically change the surface energy. Preferred materials include perfluorocarbon molecules or polymers with various functional groups. Functional groups (carboxylic acids, hydroxyls, epoxies, aldehydes, and/or thiols) attach the material to the substrate surface by physical adsorption or chemical bonding, while the perfluorocarbon component contributes to low surface energy. Using the disclosed materials and methods, the surface properties are rapidly converted from hydrophilic to hydrophobic (water contact angle 120° and PGMEA contact angle 70°). Selective lyophobic modification of copper to Si/SiOx, TiOx to Si/SiOx, and SiN to SiOx is also demonstrated. |