| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c28d4ea320b90ed19f8de42eb1428cc8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate |
2020-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d86a3f35a3dfb73be08349fed0bc837b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ce32c7a72ad450a3d04ac8a049dad50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0624ba8e9e5f9bdf1c99d02b4b5a2af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6036bda9882156451b7721656ee84c39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54a628e7ad0c0ed9b8e4b18114dd46bb |
| publicationDate |
2022-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20220050922-A |
| titleOfInvention |
Surface Treatment Compositions and Methods |
| abstract |
The present disclosure relates to methods and compositions for processing a semiconductor substrate having a pattern disposed over a surface of the substrate. |
| priorityDate |
2019-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |