| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_130d6165fbf2872cfbe14c667d5a0c4b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d068951240d23f843865b8fd574c7aa9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D50-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F11-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D46-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D46-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D50-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F11-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D47-06 |
| filingDate |
2021-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c692f88d37ddb66348157f0896e5a3c |
| publicationDate |
2022-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20220019628-A |
| titleOfInvention |
Wet cleaning tower equipped with de-watering device for solid materials |
| abstract |
The present invention relates to a wet scrubbing tower equipped with a device for dehydration of solid materials, which is a wet scrubbing tower due to accumulation of solids generated during a neutralization treatment process for waste acid used in a production process of a semiconductor processing gas raw material. There are advantages in that it is possible to prevent clogging of the filter, to effectively dewater the water contained in the solid material, and to minimize the water consumption by recirculating the dehydrated water from the solid material to the inside of the wet scrubbing tower. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102525883-B1 |
| priorityDate |
2020-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |