| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25B9-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25B9-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 |
| filingDate |
2022-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3dca9f173dfeabf19a217b6852286b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b1a1b3a4ffcde88ec22f852d9a5fb44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9943a2ad1cfd23f230bf869c481dc7e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64c546a8b5b2d55b595559e7f04a703e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da72a995441c0775f5b34bbca329561c |
| publicationDate |
2022-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20220014907-A |
| titleOfInvention |
Membrane design for reducing defects in electroplating systems |
| abstract |
Certain embodiments disclosed herein relate to apparatus and methods for electrodeposition of material on a substrate. More specifically, novel membranes for separating a cathode/substrate from an anode, and methods of using such membranes are provided. The membrane includes at least an ion exchange layer and a charge separation layer. The disclosed embodiments are particularly advantageous in maintaining relatively constant concentrations of species in the electrolyte over time during resting (ie, no plating) periods. |
| priorityDate |
2013-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |