http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220006663-A

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filingDate 2020-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20220006663-A
titleOfInvention In-situ control of film properties during atomic layer deposition
abstract Methods are provided herein for providing control of film properties during atomic layer deposition using in-situ intermittent plasma treatment. The methods include modulating gas flow rate ratios used to generate plasma during intermittent plasma processing, toggling plasma power, and adjusting chamber pressure.
priorityDate 2019-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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