| abstract |
Embodiments of the present disclosure provide solid state dual pore sensors that can be used for biopolymer sequencing and methods of forming dual pore sensors formed therefrom. In one embodiment, a method of forming a dual pore sensor includes providing a pattern on a surface of a substrate. Generally, the pattern features two fluid reservoirs separated by a divider wall. The method comprises depositing a sacrificial material layer in two fluid reservoirs, depositing a membrane layer, patterning two nanopores through the membrane layer, removing the sacrificial material from the two fluid reservoirs. and patterning the one or more fluid ports and the common chamber. |