| abstract |
The gas supply member includes a first side opposite the second side and an inner surface defining a first opening extending between the first side and the second side. The gas supply member includes a third side orthogonal to the first side, the third side includes a first extension having a face partially defining the second side, the first extension comprising: and a first plurality of apertures extending through and into its face. The gas supply member includes a fourth side opposite the third side, the fourth side including a protrusion having a face that partially defines the second side. The gas supply member also includes a baffle disposed adjacent the inner surface, the baffle including a first portion extending from the inner surface, and a second portion attached to the first portion, the second portion comprising: Orthogonal to part 1 and parallel to the third side. |