| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a659ccb3736a8d908986058fbb54aa1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cdef51e2ea658d18ec08a2b96e3d487f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2205-0103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2201-0109 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-04 |
| filingDate |
2020-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd6d8cca3b47e4869ec3e42ef4194fe8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f5363911bf27be5665d4e974bd8a691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_808556a4c3a39d3db6a238d4a03c1f44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae001f4ae2cae275061926d29455e9c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db7806c12f418a3c3c8cb38923a5317f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80ee2b7d3b956f7c2b995b70bf269f05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60cc5345f4bf38a9c061261be5cd141b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0ee78f6e17b699cdd1fd267ddcb8ccc |
| publicationDate |
2021-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20210151483-A |
| titleOfInvention |
endcap removal auto supply apparatus of gas cylinder |
| abstract |
The present invention relates to an end cap separation/fastening module for an automatic gas supply device of a gas cylinder that automatically supplies gas from a horizontal (recumbent position) gas cylinder transported toward an automatic gas supply device to a semiconductor manufacturing process. It relates to an end cap separation/fastening module for an automatic gas supply device of a gas cylinder that can stably detect whether an end cap is held regardless of its shape with a high-frequency oscillation type proximity sensor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115717683-A |
| priorityDate |
2020-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |