| abstract |
The reactor for coating particles comprises a fixed vacuum chamber having a lower portion forming a half cylinder, and an upper portion for holding a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a paddle assembly a motor for rotating the drive shaft, a chemical delivery system for delivering a first fluid, and a first gas injection assembly for receiving a first fluid from the chemical delivery system, the first gas injection assembly comprising: having apertures configured to inject a first reactant or precursor gas into a lower portion of the chamber such that a first reactant or precursor gas flows substantially abutting the curved interior surface of the half cylinder. |