http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210139310-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-24 |
| filingDate | 2020-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20210139310-A |
| titleOfInvention | Cross-linkable siloxane compounds for making dielectric materials |
| abstract | The present invention relates to novel siloxane oligomers and polymers and crosslinkable compositions that may be used in the preparation of dielectric materials having good barrier, passivation and/or planarization properties. Also provided are monomer compositions from which siloxane oligomers or polymers can be obtained and processes for making such siloxane oligomers or polymers. In addition, the present invention relates to a method of manufacturing a microelectronic structure in which a crosslinkable composition is applied to the surface of a substrate and then cured, and an electronic device comprising the microelectronic structure obtained by the manufacturing method. |
| priorityDate | 2019-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 84.