http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210138423-A
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30 |
filingDate | 2020-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20210138423-A |
titleOfInvention | Etchant composition for silver-containing metal layer |
abstract | The present invention relates to an etchant composition for etching a metal film including silver or a silver alloy or an upper film including silver and indium oxide film without damaging the lower film, and by uniformly etching the upper film, the occurrence of an etch bias is reduced. and to minimize the generation of silver-reducing precipitates. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022127729-A1 |
priorityDate | 2020-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 252.