http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210133159-A

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-16
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-303
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-385
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-281
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
filingDate 2021-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20210133159-A
titleOfInvention Iodized aromatic carboxylic acid type pendant-containing polymer, resist composition and patterning process
abstract An iodinated aromatic carboxylic acid type pendant group-containing polymer is provided. The resist material containing this is highly sensitive both in the positive resist material and in the negative resist material, and it is difficult to form nanobridges, pattern collapse, or residues.
priorityDate 2020-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014067012-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007297590-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019001997-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014067014-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226141
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID465908192
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409709356
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467466014
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226142
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID465170852
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID146935644
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467475393
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467475841
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407378857
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466277571
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467016040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466225636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88588646
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466563198
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226331
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466321710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226366
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID163972536
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466569192
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466224824
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467218777
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226486
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466569194
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467939885
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467939886
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467939887
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467098591
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467098784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466591302
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467710690
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID140828234
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468057092
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467710692
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466607276
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID465393946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466225194
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413830679
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466569197
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID149067513
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466569198
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468213885
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467665338
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468041182
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466569221
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998394
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468227729
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466224243
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467705744
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466591284
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID468227739
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408470213
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466644756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998401
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430977785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998405
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID429946888
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCQ29078
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466997190
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159959349
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466994886
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466997191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID164079536
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466631322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID149193410
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466995209
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412709982
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998415
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466563197
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467099008
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466637766
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466997095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451402512
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998391
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467099030
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466637767
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467466006
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998390
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467008130
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID148081610
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467099044
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID465750957
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7221
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID163571192
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226153
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467016034
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226154
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467016035
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226294
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226345
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467001314
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466225413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID163727083
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466998417
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467001622
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466221614
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467002294
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466221617
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466226545
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466225354
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467002625

Total number of triples: 151.