Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
filingDate |
2021-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14d862f3ca312bacebe81a81d7da5f69 |
publicationDate |
2021-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20210119876-A |
titleOfInvention |
Polishing composition, production method of the same, polishing method, and manufacturing method of semiconductor substrate |
abstract |
The present invention provides a means capable of improving the polishing inhibitory effect of silicon nitride. The present invention relates to a polishing composition comprising cation-modified silica particles, a non-aromatic crosslinked cyclic compound having an organic acid group or a salt group thereof, and water. |
priorityDate |
2020-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |