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filingDate 2020-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20210119641-A
titleOfInvention Silicon nitride layer etching composition
abstract The present invention relates to a silicon nitride film etching composition, and more specifically, by including a silicon-based compound including a cyano group in the etching composition, the silicon nitride film can be stably etched with a high selectivity compared to the silicon oxide film, and deposits that adversely affect device properties The present invention relates to an etching composition for a silicon nitride film that does not cause problems such as generation and abnormal growth of a silicon oxide film, a method for etching a silicon nitride film using the same, and a method for manufacturing a semiconductor device.
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type http://data.epo.org/linked-data/def/patent/Publication

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