Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98a75c9fff239084cf3c988c59841957 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36 |
filingDate |
2020-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6cbac52c0fbc5ce308f70cfed86e935 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_188defd48490e70eee1f39ee7ae27955 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cc871732eaafe346d8f591c5661b8a1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc08a0a245241c2fac9367e0ff3a6b62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc81ed8b6d37e085af736bd1b0f14149 |
publicationDate |
2021-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20210111360-A |
titleOfInvention |
Compositions for silicon-containing films and methods of use thereof |
abstract |
Described herein are precursors and methods for forming silicon-containing films. In one embodiment there is provided a precursor of formula (I) as described herein. |
priorityDate |
2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |