| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36333273e27f0db23ddddbf80ba79ba7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C3-001 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00 |
| filingDate |
2020-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fcab8d893848175fd42239e58997b1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_457047e119c007f3990ecea1090a58c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70742ae821bbf299bc42a39a3ad5469c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59720b8ee1c1563e62c72c87e12956a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd94e7becfd946578c0bc7956fab395d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d50b47e75dcd954f0fceb57e85af4162 |
| publicationDate |
2021-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20210110173-A |
| titleOfInvention |
Micro-electro mechanical system and manufacturing method thereof |
| abstract |
A micro electro mechanical system (MEMS) includes: a circuit board including an electronic circuit unit; a support substrate having a recess; a bonding layer disposed between the circuit board and the support substrate; through holes passing through the circuit board to the openings; a first conductive layer disposed on the front surface of the circuit board; a second conductive layer disposed on the inner wall of the recess; and a third conductive layer disposed on an inner wall of each of the through holes. |
| priorityDate |
2020-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |